Email this article Measurement of the Thickness Nonuniformity of Nanofilms Using an Electron Probe Method
- Authors: Darznek S.A.1, Kuzin A.Y.2, Mityukhlyaev V.B.1, Stepovich M.A.3, Todua P.A.1, Filippov M.N.1,4
-
Affiliations:
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Kaluga State University
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
- Issue: Vol 59, No 8 (2016)
- Pages: 822-825
- Section: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/245449
- DOI: https://doi.org/10.1007/s11018-016-1051-9
- ID: 245449
Cite item
Open Access
Access granted
Subscription Access
Abstract
We propose an electron-probe method for measuring thickness nonuniformity in nanofilms, using the dependence of the ratio of the intensities of the characteristic x-ray film elements on its thickness. The calibration dependence is computed simulating the interaction of electrons with the sample by a Monte-Carlo method.
About the authors
S. A. Darznek
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Author for correspondence.
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
M. A. Stepovich
Kaluga State University
Email: fgupnicpv@mail.ru
Russian Federation, Kaluga
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Moscow
