Отправить статью по E-mail Measurement of the Thickness Nonuniformity of Nanofilms Using an Electron Probe Method
- Авторы: Darznek S.A.1, Kuzin A.Y.2, Mityukhlyaev V.B.1, Stepovich M.A.3, Todua P.A.1, Filippov M.N.1,4
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Учреждения:
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Kaluga State University
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
- Выпуск: Том 59, № 8 (2016)
- Страницы: 822-825
- Раздел: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/245449
- DOI: https://doi.org/10.1007/s11018-016-1051-9
- ID: 245449
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Аннотация
We propose an electron-probe method for measuring thickness nonuniformity in nanofilms, using the dependence of the ratio of the intensities of the characteristic x-ray film elements on its thickness. The calibration dependence is computed simulating the interaction of electrons with the sample by a Monte-Carlo method.
Об авторах
S. Darznek
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Автор, ответственный за переписку.
Email: fgupnicpv@mail.ru
Россия, Moscow
A. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: fgupnicpv@mail.ru
Россия, Moscow
V. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Россия, Moscow
M. Stepovich
Kaluga State University
Email: fgupnicpv@mail.ru
Россия, Kaluga
P. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Россия, Moscow
M. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
Email: fgupnicpv@mail.ru
Россия, Moscow; Moscow
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