Linear Thermal Expansion Coefficient (at Temperatures from 130 to 800 K) of Borosilicate Glasses Suitable for Silicon Compounds in Microelectronics

Аннотация

The measurements of the CLTE and relative elongation of two types of borosilicate glasses — LK5 and Borofloat 33 — are analyzed. A TMA7100 thermomechanical analyzer is used to measure the elongation of glass samples at temperatures from 130 to 800 K (−143 to +526°C). The relative error of indirect measurements of the CLTE and the relative thermal elongation of both types of glasses did not exceed ±5 and ±3%, respectively. Polynomial equations for obtaining fits to the measurements as a function of the temperature are presented. The results will facilitate the modeling of the characteristics of the devices which are used in microsystems engineering and fabricated by anodic deposition of silicon on glass; they can also be used to optimize the temperature regime of silicon bonding with glass.