Thermodynamic simulation of the CVD process in the system Ni–Si–C–H
- Authors: Shestakov V.A.1, Kosinova M.L.1
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Affiliations:
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
- Issue: Vol 69, No 1 (2024)
- Pages: 43-48
- Section: ФИЗИКО-ХИМИЧЕСКИЙ АНАЛИЗ НЕОРГАНИЧЕСКИХ СИСТЕМ
- URL: https://journals.rcsi.science/0044-457X/article/view/257659
- DOI: https://doi.org/10.31857/S0044457X24010059
- EDN: https://elibrary.ru/ZZSXIQ
- ID: 257659
Cite item
Abstract
Owing to its unique properties, oxygen-free ceramics are promising for use in various branches of technology. The inclusion of metals or their compounds in this ceramic significantly expands the possibilities of its application. Therefore, methods for the synthesis of such composites are being actively developed. One of the ways to obtain such films is the deposition from the gas phase. Thermodynamic modeling allows you to choose the conditions for this process. In this work, thermodynamic modeling of the CVD process in the Ni-Si-C-H system, where nickelocene and silane were precursors, was carried out. The results of the work can be useful for developing methods for obtaining film materials based on SiC and nickel-containing phases.
Full Text
About the authors
V. A. Shestakov
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
Author for correspondence.
Email: vsh@niic.nsc.ru
Russian Federation, 630090 Novosibirsk
M. L. Kosinova
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
Email: vsh@niic.nsc.ru
Russian Federation, 630090 Novosibirsk
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