Resistance Si–Ti–Ce alloy for sputtering targets
- 作者: Kolesnikova I.1, Korotkov V.1, Kuz’mich Y.1
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隶属关系:
- Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
- 期: 卷 2016, 编号 5 (2016)
- 页面: 472-476
- 栏目: Article
- URL: https://journals.rcsi.science/0036-0295/article/view/170574
- DOI: https://doi.org/10.1134/S0036029516050104
- ID: 170574
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详细
The effect of the cooling rate of an Si–20% Ti–5% Ce alloy on the microstructure, the micromechanical characteristics, and the residual thermal stresses in targets prepared from the alloy is studied. The required amount of targets prepared from this alloy can be obtained when it is cooled at a rate from 20 to 70°C/s. In this case, the alloy has a homogeneous structure and exhibits high strength characteristics; the residual stresses in a target are minimal and their distribution is the most uniform.
作者简介
I. Kolesnikova
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
编辑信件的主要联系方式.
Email: koles_ig@chemy.kolasc.net.ru
俄罗斯联邦, ul. Fersmana 26a, Apatity, 184209
V. Korotkov
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
俄罗斯联邦, ul. Fersmana 26a, Apatity, 184209
Yu. Kuz’mich
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
俄罗斯联邦, ul. Fersmana 26a, Apatity, 184209