Resistance Si–Ti–Ce alloy for sputtering targets
- Авторлар: Kolesnikova I.1, Korotkov V.1, Kuz’mich Y.1
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Мекемелер:
- Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
- Шығарылым: Том 2016, № 5 (2016)
- Беттер: 472-476
- Бөлім: Article
- URL: https://journals.rcsi.science/0036-0295/article/view/170574
- DOI: https://doi.org/10.1134/S0036029516050104
- ID: 170574
Дәйексөз келтіру
Аннотация
The effect of the cooling rate of an Si–20% Ti–5% Ce alloy on the microstructure, the micromechanical characteristics, and the residual thermal stresses in targets prepared from the alloy is studied. The required amount of targets prepared from this alloy can be obtained when it is cooled at a rate from 20 to 70°C/s. In this case, the alloy has a homogeneous structure and exhibits high strength characteristics; the residual stresses in a target are minimal and their distribution is the most uniform.
Авторлар туралы
I. Kolesnikova
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Хат алмасуға жауапты Автор.
Email: koles_ig@chemy.kolasc.net.ru
Ресей, ul. Fersmana 26a, Apatity, 184209
V. Korotkov
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Ресей, ul. Fersmana 26a, Apatity, 184209
Yu. Kuz’mich
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Ресей, ul. Fersmana 26a, Apatity, 184209