Email this article Resistance Si–Ti–Ce alloy for sputtering targets
- Authors: Kolesnikova I.G.1, Korotkov V.G.1, Kuz’mich Y.V.1
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Affiliations:
- Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
- Issue: Vol 2016, No 5 (2016)
- Pages: 472-476
- Section: Article
- URL: https://journals.rcsi.science/0036-0295/article/view/170574
- DOI: https://doi.org/10.1134/S0036029516050104
- ID: 170574
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Abstract
The effect of the cooling rate of an Si–20% Ti–5% Ce alloy on the microstructure, the micromechanical characteristics, and the residual thermal stresses in targets prepared from the alloy is studied. The required amount of targets prepared from this alloy can be obtained when it is cooled at a rate from 20 to 70°C/s. In this case, the alloy has a homogeneous structure and exhibits high strength characteristics; the residual stresses in a target are minimal and their distribution is the most uniform.
About the authors
I. G. Kolesnikova
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Author for correspondence.
Email: koles_ig@chemy.kolasc.net.ru
Russian Federation, ul. Fersmana 26a, Apatity, 184209
V. G. Korotkov
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Russian Federation, ul. Fersmana 26a, Apatity, 184209
Yu. V. Kuz’mich
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Russian Federation, ul. Fersmana 26a, Apatity, 184209
