Author Details
Ezhovskii, Yu.
Issue | Section | Title | File |
Vol 90, No 3 (2016) | Physical Chemistry of Surface Phenomena | Atomic layer deposition of zinc sulfide nanolayers on monocrystalline silicon substrates | |
Vol 91, No 4 (2017) | Physical Chemistry of Nanoclusters and Nanomaterials | Molecular layering of silicon and aluminum oxides on binary semiconductors | |
Vol 92, No 3 (2018) | Physical Chemistry of Surface Phenomena | Molecular Layer Deposition of Silicon Nitride with Glow Discharge Activation |