Информация об авторе
Ezhovskii, Yu.
Выпуск | Раздел | Название | Файл |
Том 90, № 3 (2016) | Physical Chemistry of Surface Phenomena | Atomic layer deposition of zinc sulfide nanolayers on monocrystalline silicon substrates | |
Том 91, № 4 (2017) | Physical Chemistry of Nanoclusters and Nanomaterials | Molecular layering of silicon and aluminum oxides on binary semiconductors | |
Том 92, № 3 (2018) | Physical Chemistry of Surface Phenomena | Molecular Layer Deposition of Silicon Nitride with Glow Discharge Activation |