Email this article Microwave Cooled Microbolometers Based on Cermet Si–Cr Films
- Authors: Vdovichev S.N.1,2,3, Vdovin V.F.3,4, Klimov A.Y.1, Mukhin A.S.3,4, Nozdrin Y.N.1, Rogov V.V.1, Udalov O.G.1,5
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Affiliations:
- Institute for Physics of Microstructures of the Russian Academy of Sciences
- Institute of Applied Physics of the Russian Academy of Sciences
- N. I. Lobachevsky State University of Nizhny Novgorod
- R. E. Alekseev State Technical University of Nizhny Novgorod
- California State University
- Issue: Vol 59, No 8-9 (2017)
- Pages: 727-733
- Section: Article
- URL: https://journals.rcsi.science/0033-8443/article/view/243732
- DOI: https://doi.org/10.1007/s11141-017-9741-y
- ID: 243732
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Abstract
We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive microbolometers for the first time. The details of fabricating such microbolometers and the prospects for using cermet films to construct microbolometers are discussed. The first estimates of sensitivity of the fabricated microbolometers are given.
About the authors
S. N. Vdovichev
Institute for Physics of Microstructures of the Russian Academy of Sciences; Institute of Applied Physics of the Russian Academy of Sciences; N. I. Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod; Nizhny Novgorod; Nizhny Novgorod
V. F. Vdovin
N. I. Lobachevsky State University of Nizhny Novgorod; R. E. Alekseev State Technical University of Nizhny Novgorod
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod; Nizhny Novgorod
A. Yu. Klimov
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod
A. S. Mukhin
N. I. Lobachevsky State University of Nizhny Novgorod; R. E. Alekseev State Technical University of Nizhny Novgorod
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod; Nizhny Novgorod
Yu. N. Nozdrin
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod
V. V. Rogov
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod
O. G. Udalov
Institute for Physics of Microstructures of the Russian Academy of Sciences; California State University
Email: vdovichev@ipmras.ru
Russian Federation, Nizhny Novgorod; Northridge, California
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