电邮这篇文章 Microwave Cooled Microbolometers Based on Cermet Si–Cr Films
- 作者: Vdovichev S.N.1,2,3, Vdovin V.F.3,4, Klimov A.Y.1, Mukhin A.S.3,4, Nozdrin Y.N.1, Rogov V.V.1, Udalov O.G.1,5
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隶属关系:
- Institute for Physics of Microstructures of the Russian Academy of Sciences
- Institute of Applied Physics of the Russian Academy of Sciences
- N. I. Lobachevsky State University of Nizhny Novgorod
- R. E. Alekseev State Technical University of Nizhny Novgorod
- California State University
- 期: 卷 59, 编号 8-9 (2017)
- 页面: 727-733
- 栏目: Article
- URL: https://journals.rcsi.science/0033-8443/article/view/243732
- DOI: https://doi.org/10.1007/s11141-017-9741-y
- ID: 243732
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详细
We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive microbolometers for the first time. The details of fabricating such microbolometers and the prospects for using cermet films to construct microbolometers are discussed. The first estimates of sensitivity of the fabricated microbolometers are given.
作者简介
S. Vdovichev
Institute for Physics of Microstructures of the Russian Academy of Sciences; Institute of Applied Physics of the Russian Academy of Sciences; N. I. Lobachevsky State University of Nizhny Novgorod
编辑信件的主要联系方式.
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod; Nizhny Novgorod; Nizhny Novgorod
V. Vdovin
N. I. Lobachevsky State University of Nizhny Novgorod; R. E. Alekseev State Technical University of Nizhny Novgorod
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod; Nizhny Novgorod
A. Klimov
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod
A. Mukhin
N. I. Lobachevsky State University of Nizhny Novgorod; R. E. Alekseev State Technical University of Nizhny Novgorod
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod; Nizhny Novgorod
Yu. Nozdrin
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod
V. Rogov
Institute for Physics of Microstructures of the Russian Academy of Sciences
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod
O. Udalov
Institute for Physics of Microstructures of the Russian Academy of Sciences; California State University
Email: vdovichev@ipmras.ru
俄罗斯联邦, Nizhny Novgorod; Northridge, California
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