X-Ray Luminescence of Zinc Oxide Thick Films

Abstract

Samples of thick (about 30 μm) films of undoped zinc oxide on sapphire prepared by magnetron sputtering using an uncooled target have been investigated. The structural and luminescence properties of the initial films and films subjected to additional recrystallization annealing in air have been studied. The time and temperature-dependent characteristics of the samples are considered. It is shown that annealing in air enhances the structural, optical, and luminescence properties of these films.