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The influence of the gas cluster ion beam composition on defect formation in targets
Ieshkin A.E., Shemukhin A.A., Ermakov Y.A., Chernysh V.S.
Effect of 4H-SiC Target Temperature under Ion Irradiation on the Distribution Profile of Al+ Ions
Shemukhin A.A., Evseev A.P., Kozhemiako A.V., Merzuk B., Egorkin V.I., Fedotov Y.S., Danilov A.V., Chernysh V.S.
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