The study of temperature properties of I.H.P. structure and its application for filters on surface acoustic waves
- 作者: Koigerov А.1, Balysheva O.2
-
隶属关系:
- Saint Petersburg Electrotechnical University “LETI”
- Saint-Petersburg State University of Aerospace Instrumentation (SUAI)
- 期: 卷 69, 编号 4 (2024)
- 页面: 639-645
- 栏目: ФИЗИЧЕСКИЕ СВОЙСТВА КРИСТАЛЛОВ
- URL: https://journals.rcsi.science/0023-4761/article/view/264368
- DOI: https://doi.org/10.31857/S0023476124040096
- EDN: https://elibrary.ru/XCXFXG
- ID: 264368
如何引用文章
详细
The results of investigation of temperature properties of I.H.P.-structures on multilayer lithium tantalate/silicon dioxide film/silicon substrate used to improve the characteristics of surface acoustic wave devices are presented. Finite element modeling of the test structures was performed in COMSOL software and the temperature frequency coefficient was calculated. A comparison of the calculated transmission coefficient of a resonator filter on a conventional 36°YX-cut lithium tantalate monocrystal substrate and an I.H.P.-filter at different temperature values is presented. The possibility of minimizing the temperature coefficient of frequency by selecting the thickness of the substrate layers is shown. Comparison of the obtained results with the known data showed good agreement. The practical significance consists in the use of modeling results and calculated parameters in the development of various classes of devices on multilayer substrates, including those with I.H.P.-structures.
作者简介
А. Koigerov
Saint Petersburg Electrotechnical University “LETI”
编辑信件的主要联系方式.
Email: a.koigerov@gmail.com
俄罗斯联邦, St. Petersburg
O. Balysheva
Saint-Petersburg State University of Aerospace Instrumentation (SUAI)
Email: balysheva@mail.ru
俄罗斯联邦, St. Petersburg
参考
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