Impurity composition of monoisotopic 28SiF4 silicon tetrafluoride

Abstract

The impurity composition of ²⁸SiF₄ has been studied for the first time by gas chromatography/mass spectrometry using gas-adsorption capillary columns. For identification and determination of impurity substances by gas chromatography/mass spectrometry, we have proposed using cryogenic preconcentration of the impurities from ²⁸SiF₄. The presence of C₂–C₄ hydrocarbon impurities and sulfur hexafluoride has been confirmed. We have identified 35 impurity substances in ²⁸SiF₄, including linear and branched C₅–C₈ saturated hydrocarbons, aromatic hydrocarbons, chlorine- and fluorine-containing hydrocarbons, and silicon- and sulfur-containing substances, of which 28 have been detected for the first time.