Wet chemical etching of PbTe and Pb1–xSnxTe crystal surfaces with bromine-releasing aqueous H2O2–HBr–citric acid solutions
- 作者: Malanych G.P.1, Tomashyk V.N.1, Stratiychuk I.B.1, Tomashyk Z.F.1
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隶属关系:
- Lashkaryov Institute of Semiconductor Physics
- 期: 卷 52, 编号 2 (2016)
- 页面: 106-112
- 栏目: Article
- URL: https://journals.rcsi.science/0020-1685/article/view/157226
- DOI: https://doi.org/10.1134/S0020168516020084
- ID: 157226
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详细
We have studied the dynamic chemical polishing of single crystals of PbTe and Pb1–xSnxTe solid solutions in H2O2–HBr–citric acid bromine-releasing etchants under reproducible hydrodynamic conditions and constructed projections of constant etch rate surfaces using simplex design of experiments. The dissolution of the crystals in the polishing mixtures has been shown to be diffusion-limited. The polished surfaces have been characterized by microstructural analysis, scanning electron microscopy, and atomic force microscopy. We have determined the compositions of H2O2–HBr–citric acid polishing etchants that can be used for high-quality polishing of the surface of the PbTe and Pb1–xSnxTe semiconductor materials at dissolution rates in the range 3.0–18.0 μm/min.
作者简介
G. Malanych
Lashkaryov Institute of Semiconductor Physics
编辑信件的主要联系方式.
Email: galya_malanich@mail.ru
乌克兰, pr. Nauki 41, Kyiv, 03028
V. Tomashyk
Lashkaryov Institute of Semiconductor Physics
Email: galya_malanich@mail.ru
乌克兰, pr. Nauki 41, Kyiv, 03028
I. Stratiychuk
Lashkaryov Institute of Semiconductor Physics
Email: galya_malanich@mail.ru
乌克兰, pr. Nauki 41, Kyiv, 03028
Z. Tomashyk
Lashkaryov Institute of Semiconductor Physics
Email: galya_malanich@mail.ru
乌克兰, pr. Nauki 41, Kyiv, 03028
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