Heterogeneous recombination of atoms on aluminum samples in chlorine plasma
- Authors: Sitanov D.V.1, Pivovarenok S.A.1
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Affiliations:
- Ivanovo State University of Chemistry and Technology
- Issue: Vol 55, No 3 (2017)
- Pages: 461-464
- Section: Short Communications
- URL: https://journals.rcsi.science/0018-151X/article/view/157192
- DOI: https://doi.org/10.1134/S0018151X1703021X
- ID: 157192
Cite item
Abstract
The kinetics of heterogeneous recombination of chlorine atoms on glass and solid samples bounding the plasma zone was investigated. The absolute values of rate constants of heterogeneous recombination of chlorine atoms (the recombination probabilities) on molybdenum reactor glass and on aluminum within the positive column zone of glow discharge in Cl2 were obtained. When obtaining the kinetic dependences, we applied a relaxation impulse technique coupled with absorption spectroscopy.
About the authors
D. V. Sitanov
Ivanovo State University of Chemistry and Technology
Author for correspondence.
Email: sitanov@isuct.ru
Russian Federation, Ivanovo, 153000
S. A. Pivovarenok
Ivanovo State University of Chemistry and Technology
Email: sitanov@isuct.ru
Russian Federation, Ivanovo, 153000
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