Heterogeneous recombination of atoms on aluminum samples in chlorine plasma

详细

The kinetics of heterogeneous recombination of chlorine atoms on glass and solid samples bounding the plasma zone was investigated. The absolute values of rate constants of heterogeneous recombination of chlorine atoms (the recombination probabilities) on molybdenum reactor glass and on aluminum within the positive column zone of glow discharge in Cl₂ were obtained. When obtaining the kinetic dependences, we applied a relaxation impulse technique coupled with absorption spectroscopy.