Email this article Materials choice criteria for surface acoustic wave sensors
- Authors: Balysheva O.L.1
-
Affiliations:
- Saint Petersburg State University of Aerospace Instrumentation
- Issue: Vol 77, No 7 (2016)
- Pages: 1286-1293
- Section: Sensors and Systems
- URL: https://journals.rcsi.science/0005-1179/article/view/150394
- DOI: https://doi.org/10.1134/S0005117916070158
- ID: 150394
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Abstract
The modern materials and types of the substrates used for the surface acoustic wave (SAW) devices are considered and their special requirements for the SAW sensors are discussed. A classification of the SAWsensors is given, and the factors of SAWsensors design and materials choice criteria are discussed.
About the authors
O. L. Balysheva
Saint Petersburg State University of Aerospace Instrumentation
Author for correspondence.
Email: balysheva@mail.ru
Russian Federation, St. Petersburg
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