Materials choice criteria for surface acoustic wave sensors
- 作者: Balysheva O.L.1
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隶属关系:
- Saint Petersburg State University of Aerospace Instrumentation
- 期: 卷 77, 编号 7 (2016)
- 页面: 1286-1293
- 栏目: Sensors and Systems
- URL: https://journals.rcsi.science/0005-1179/article/view/150394
- DOI: https://doi.org/10.1134/S0005117916070158
- ID: 150394
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详细
The modern materials and types of the substrates used for the surface acoustic wave (SAW) devices are considered and their special requirements for the SAW sensors are discussed. A classification of the SAWsensors is given, and the factors of SAWsensors design and materials choice criteria are discussed.
作者简介
O. Balysheva
Saint Petersburg State University of Aerospace Instrumentation
编辑信件的主要联系方式.
Email: balysheva@mail.ru
俄罗斯联邦, St. Petersburg
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