Implementation of high-pass subterahertz filters using high-aspect-ratio polimeric structures

Аннотация

This paper describes a technological approach to the implementation of quasioptical high-pass subterahertz filters with the use of high-aspect pseudometallic structures. The approach is based on micropatterning a solid polymer layer of polymethylmethacrylate by means of synchrotron X-ray lithography with subsequent metallization of the entire surface of the structure. A fabricated specimen and operational characteristics for the filter with a cutoff frequency of 0.275 THz, which has the thickness of 1 mm and is formed by hexagon-shaped through-holes arranged on a triangular lattice with 70-μm wide crosspieces, are demonstrated.