Formation of Piezo- and Pyroelectric Matrices with the Use of Nanoprofiled Silica


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In this work, a process solution for the formation of an array of piezo- and pyroelectric structures with the use of a matrix of nanoprofiled silica is demonstrated. It is proposed to use plasma etching through a hard mask of porous anodic alumina for the formation of the matrix. Nanoparticles of a ferroelectric copolymer of vinylidene fluoride with trifluoroethylene are formed in the pores of the matrix. The results of measurements of the piezoelectric and pyroelectric responses of this structure are presented.

Sobre autores

A. Belov

National Research University of Electronic Technology “MIET”

Autor responsável pela correspondência
Email: nanointech@mail.ru
Rússia, ZelenogradMoscow, 124498

A. Golishnikov

National Research University of Electronic Technology “MIET”

Email: nanointech@mail.ru
Rússia, ZelenogradMoscow, 124498

G. Pestov

National Research University of Electronic Technology “MIET”

Email: nanointech@mail.ru
Rússia, ZelenogradMoscow, 124498

A. Solnyshkin

Tver State University

Email: nanointech@mail.ru
Rússia, Tver, 170100

V. Shevyakov

National Research University of Electronic Technology “MIET”

Email: nanointech@mail.ru
Rússia, ZelenogradMoscow, 124498

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