Nanostructuring of Titanium-Doped Diamond-Like Nanocomposite Films via Electric Probe Lithography
- Авторлар: Pivovarov P.A.1, Zavedeev E.V.1, Shupegin M.L.2, Frolov V.D.1, Pimenov S.M.1
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Мекемелер:
- Prokhorov General Physics Institute of the Russian Academy of Sciences
- National Research University Moscow Power Engineering Institute
- Шығарылым: Том 13, № 9-10 (2018)
- Беттер: 464-469
- Бөлім: Nanostructures, Including Nanotubes
- URL: https://journals.rcsi.science/2635-1676/article/view/220623
- DOI: https://doi.org/10.1134/S1995078018050105
- ID: 220623
Дәйексөз келтіру
Аннотация
The influence of titanium doping of diamond-like nanocomposite films a-C:H,Si:O on the process of their structuring by the technique of bias-induced probe nanolithography of the scanning probe microscope (SPM) was studied. It has been found that titanium doping suppresses formation of dendritic-like structures that grow in undoped a-C:H,Si:O films at relative humidity above 50%. Instead of dendritic-like nanostructures, hill-like protrusions arise. At the same time, a decrease in the electrical conductivity and an increase in the friction forces in the modified region are close to those on films without metal. The mechanisms of the observed effects are discussed.
Авторлар туралы
P. Pivovarov
Prokhorov General Physics Institute of the Russian Academy of Sciences
Хат алмасуға жауапты Автор.
Email: p_pivovarov@hotmail.com
Ресей, Moscow, 119991
E. Zavedeev
Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: p_pivovarov@hotmail.com
Ресей, Moscow, 119991
M. Shupegin
National Research University Moscow Power Engineering Institute
Email: p_pivovarov@hotmail.com
Ресей, Moscow, 111250
V. Frolov
Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: p_pivovarov@hotmail.com
Ресей, Moscow, 119991
S. Pimenov
Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: p_pivovarov@hotmail.com
Ресей, Moscow, 119991
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