Отправить статью по E-mail Electron microscopy characterization of higher manganese silicide film structure on silicon
- Авторы: Orekhov A.S.1,2, Kamilov T.S.3, Orekhov A.S.1,2, Arkharova N.A.1, Rakova E.V.1, Klechkovskaya V.V.1
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Учреждения:
- Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”
- National Research Center “Kurchatov Institute,”
- Tashkent State Technical University
- Выпуск: Том 11, № 9-10 (2016)
- Страницы: 610-616
- Раздел: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/219570
- DOI: https://doi.org/10.1134/S1995078016050128
- ID: 219570
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Аннотация
The structure and composition of higher manganese silicide (HMS) films on Si(111) substrate are studied by high-resolution transmission electron microscopy, electron diffraction, and energy-dispersive X-ray spectroscopy. The formation of Mn4Si7 HMS film by the deposition of the gas-phase manganese onto silicon at 1040°C is observed. The film/substrate interface is semicoherent and does not contain any intermediate layer. The interface structure is refined by computer simulation. The orientation relationship \(\left( {\overline 1 \overline 2 4} \right)\left[ {443} \right]M{n_4}S{i_7}||\left( {1\overline 1 \overline 1 } \right)\left[ {001} \right]Si\) between the film and substrate is determined.
Об авторах
Andrey Orekhov
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”; National Research Center “Kurchatov Institute,”
Автор, ответственный за переписку.
Email: andrey.orekhov@gmail.com
Россия, Leninskii pr. 59, Moscow, 119333; pl. Akademika Kurchatova 1, Moscow, 123182
T. Kamilov
Tashkent State Technical University
Email: andrey.orekhov@gmail.com
Узбекистан, ul. Universitetskaya 2, Tashkent, 100095
Anton Orekhov
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”; National Research Center “Kurchatov Institute,”
Email: andrey.orekhov@gmail.com
Россия, Leninskii pr. 59, Moscow, 119333; pl. Akademika Kurchatova 1, Moscow, 123182
N. Arkharova
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”
Email: andrey.orekhov@gmail.com
Россия, Leninskii pr. 59, Moscow, 119333
E. Rakova
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”
Email: andrey.orekhov@gmail.com
Россия, Leninskii pr. 59, Moscow, 119333
V. Klechkovskaya
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics,”
Email: andrey.orekhov@gmail.com
Россия, Leninskii pr. 59, Moscow, 119333
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