Equilibrium energy and technological characteristics of plasma synthesis of titanium nitride, carbide, and carbonitride from titanium tetrachloride

Abstract

Equilibrium energy and technological characteristics of the plasma synthesis of titanium nitride, carbide, and carbonitride, in particular, the composition and yields of final products, energy consumption upon their production, and the required enthalpy of a plasma flow, are calculated for the following reactions: TiCl₄ + xH₂ + yN₂ (synthesis of TiN), TiCl₄ + xH₂ + zC_mH_n (synthesis of TiC), and TiCl₄ + xH₂ + y₁N₂ + z₁C_mH_n (synthesis of TiCN). The calculations are carried out for the temperature range from 500 to 4000 K, at the total pressure of 0.1 MPa in the system, and with the following molar ratios of reagents: x = 8, x = 20; y = 0.5, y = 5, y = 20; z = 0.9, z = 1.0, z = 1.1; y₁ = 5; z₁ = 0.4, z₁ = 0.5, z₁ = 0.6.