Ellipsometric control of the thickness of the film of silicon carbide on the basis polymetylmetacrylate
- Authors: Voronov A.P1, Voronov I.A.1, Mitrofanov E.A2
-
Affiliations:
- «A.I. Evdokimov Moscow state medical dental University»
- «S.A. Vekshinskiy Research Institute of vacuum technology»
- Issue: Vol 19, No 1 (2015)
- Pages: 24-26
- Section: Articles
- URL: https://journals.rcsi.science/1728-2802/article/view/39332
- DOI: https://doi.org/10.17816/dent.39332
- ID: 39332
Cite item
Abstract
By experimental measurements caused by ion-plasma sputtering of thin films of SiC has been shown that the ellipsometric measurement ofparameters of thin films are accurate and reliable method of control of technological process ofmanufacturing of complex composite coatings, so you can choose the time of coating to obtain a desired thickness.
Keywords
Full Text
##article.viewOnOriginalSite##About the authors
A. P Voronov
«A.I. Evdokimov Moscow state medical dental University»Department of complex prosthetic dentistry 127206, Moscow
Igor Anatolievich Voronov
«A.I. Evdokimov Moscow state medical dental University»
Email: voronov77@mail.ru
Department of complex prosthetic dentistry 127206, Moscow
E. A Mitrofanov
«S.A. Vekshinskiy Research Institute of vacuum technology»117105, Moscow
References
- Vedam K. Spectroscopic ellipsometry: a historical overview. Thin Solid Films. 1998; 313-314: 1-9.
- Azzam R.M.A. Ellipsometry. In: Handb. Opt. Vol. I: Geom. Phys. Opt. Polariz. Light. Components Instruments. Third Ed. / Ed. M. Bass. McGraw Hill Professional, Access Engineering; 2010: 16.116.25.
- Воевода М.И. и др. Применение эллипсометрии для исследований биоорганических сред. Автометрия. 2011; 47(5): 114-21.
- Kolodnyi G.Y. et al. Ion beam optical coatings for visible and near-IR lasers. In: Laser Opt. 2000 / Ed V.I. Ustugov. International Society for Optics and Photonics; 2001: 120-5.
- Крылова Т.Н., Бохонская И.Ф., Карапетян Г.А. Измерение прозрачных пленок на поверхности стекла эллипсометрическим и спектрофотометрическим методами. Оптика и спектроскопия. 1980; 49(4): 802-8.
- Anusavice K.J. Phillips’ Science of Dental Materials. 11th Ed. Elsevier Health Sciences; 2003.
- Gautam R. et al. Biocompatibility of polymethylmethacrylate resins used in dentistry. J. Biomed. Mater. Res. B: Appl. Biomater. 2012; 100(5): 1444-50.
- Nikawa H., Yamamoto T., Hamada T. Effect of components of resilient denture-lining materials on the growth, acid production and colonization of Candida albicans. J. Oral Rehabil. 1995; 22(11): 817-24.
- Austin A.T., Basker R.M. The level of residual monomer in acrylic denture base materials with particular reference to a modified method of analysis. Br. Dent. J. 1980; 149(10): 281-6.
- Kallus T., Mjor I.A. Incidence of adverse effects of dental materials. Scand. J. Dent. Res. 1991; 99(3): 236-40.
- Takami Y. et al. Protein adsorption onto ceramic surfaces. J. Biomed. Mater. Res. 1998; 40(1): 24-30.
- Harder C., Rzany A., Schaldach M. Coating of vascular stents with antithrombogenic amorphous silicon carbide. Progr. Biomed. Res. 1999; 4: 71-7.
- Huguenin-Love J. et al. Growth and characterization of silicon carbide thin films on silicon using a hollow cathode pulse sputtering technique. Thin Solid Films. 2012; 520(7): 2395-408.
- Saddow S.E. et al. Chapter 2: SiC films and coatings: Amorphous, polycrystalline, and single crystal forms. Silicon Carbide Biotechnol. Elsevier; 2012: 17-61.
- Азарова В.В., Вольпян О.Д., Фокин В.В. Эллипсометрия градиентных диэлектрических нанопленок. В кн.: Труды X Межвузовской научной школы молодых специалистов «Концентрированные потоки энергии в космической технике, электронике, экологии и медицине». 2011; 19-27.