Email this article Hybrid Organosilicate Low-k Dielectrics with Benzene Bridge Groups with Increased Mechanical Properties and Small Pore Size for Modern BEOL Metallization - PDF (Russian)
Copyright (c) 2023 Rezvanov A.A., Vishnevskiy A.S., Seregin D.S., Lomov A.A., Vorotilov K.A., Baklanov M.R.