Studying the composition and structure of films obtained by thermal oxidation of copper


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The composition and structure of copper oxide thin films obtained by thermal oxidation of copper layers with a thickness of 100 nm, deposited onto quartz glass by high-frequency magnetron sputtering, have been studied. The dependences of the film thickness and content of CuO and Cu2O oxides in it on the temperature–time conditions of thermal treatment are obtained. The studies have shown that depending on the preparation modes, the films can be multiphase and contain different copper oxides, predominantly, CuO and Cu2O, which possess different bandgaps and p-type conductivity.

作者简介

Sh. Adilov

Satpaev Kazakh National Technical University

Email: MuhinNV_LETI@mail.ru
哈萨克斯坦, Almaty, 050013

V. Afanaciev

Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”

Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376

I. Kashkul

Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”

Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376

S. Kumekov

Satpaev Kazakh National Technical University

Email: MuhinNV_LETI@mail.ru
哈萨克斯坦, Almaty, 050013

N. Mukhin

Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”

编辑信件的主要联系方式.
Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376

E. Terukov

Ioffe Physicotechnical Institute

Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 194021

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