Studying the composition and structure of films obtained by thermal oxidation of copper
- 作者: Adilov S.R.1, Afanaciev V.P.2, Kashkul I.N.2, Kumekov S.E.1, Mukhin N.V.2, Terukov E.I.3
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隶属关系:
- Satpaev Kazakh National Technical University
- Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”
- Ioffe Physicotechnical Institute
- 期: 卷 43, 编号 3 (2017)
- 页面: 272-275
- 栏目: Article
- URL: https://journals.rcsi.science/1087-6596/article/view/216014
- DOI: https://doi.org/10.1134/S1087659617030026
- ID: 216014
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详细
The composition and structure of copper oxide thin films obtained by thermal oxidation of copper layers with a thickness of 100 nm, deposited onto quartz glass by high-frequency magnetron sputtering, have been studied. The dependences of the film thickness and content of CuO and Cu2O oxides in it on the temperature–time conditions of thermal treatment are obtained. The studies have shown that depending on the preparation modes, the films can be multiphase and contain different copper oxides, predominantly, CuO and Cu2O, which possess different bandgaps and p-type conductivity.
作者简介
Sh. Adilov
Satpaev Kazakh National Technical University
Email: MuhinNV_LETI@mail.ru
哈萨克斯坦, Almaty, 050013
V. Afanaciev
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”
Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376
I. Kashkul
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”
Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376
S. Kumekov
Satpaev Kazakh National Technical University
Email: MuhinNV_LETI@mail.ru
哈萨克斯坦, Almaty, 050013
N. Mukhin
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University “LETI”
编辑信件的主要联系方式.
Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 197376
E. Terukov
Ioffe Physicotechnical Institute
Email: MuhinNV_LETI@mail.ru
俄罗斯联邦, St. Petersburg, 194021
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