Volatile Heteroligand Complexes of Copper(II): New Precursors for Chemical Vapor Deposition of Copper Films
- Authors: Krisyuk B.V.1, Turgambaeva A.E.1, Stabnikov P.A.1, Igumenov I.K.1, Sysoev S.V.1, Rumyantsev Y.M.1, Prokhorova S.A.1, Maksimovskii E.A.1, Maslova O.V.1
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Affiliations:
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch
- Issue: Vol 91, No 7 (2018)
- Pages: 1068-1075
- Section: Inorganic Synthesis and Industrial Inorganic Chemistry
- URL: https://journals.rcsi.science/1070-4272/article/view/215928
- DOI: https://doi.org/10.1134/S1070427218070029
- ID: 215928
Cite item
Abstract
Two heteroligand ketoiminate–diketonate complexes of copper(II), CuL(hfa) (1), L = pentane-2-imino-4-onato, CH3COCHCNHCH3–, and CuL′(hfa) (2), L′ = 2,2,6,6-tetramethyl-3-iminoheptane-5-onato, C(CH3)3COCHCNHC(CH)–, were studied as precursors for chemical vapor deposition of copper films. The flow method was employed to measure the temperature dependences of a saturated vapor pressure of these compounds, the thermodynamic parameters of evaporation–sublimation were calculated, and the volatilities of these compounds and thermal behaviors in the condensed and gaseous phases were compared. The copper films were compared, and it was shown that comparatively high growth rates are reached when (2) is used to obtain copper films in hydrogen.
About the authors
B. V. Krisyuk
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
A. E. Turgambaeva
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
P. A. Stabnikov
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
I. K. Igumenov
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Author for correspondence.
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
S. V. Sysoev
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
Yu. M. Rumyantsev
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
S. A. Prokhorova
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
E. A. Maksimovskii
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
O. V. Maslova
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: igumen@niic.nsc.ru
Russian Federation, Novosibirsk, 630090
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