Synthesis of molybdenum disulfide particles by aerosol-assisted chemical vapor deposition

Abstract

It was shown that dimethylformamide can be, in principle, used as a solvent of ammonium thiomolybdate for obtaining molybdenum disulfide particles by the aerosol-assisted chemical vapor deposition method. IR Fourier spectroscopy was used to examine (NH₄)₂MoS₄–C₃H₇NO liquid solutions and the thermal stability of dimethylformamide and ammonium thiomolybdate vapors. It was demonstrated that pyrolysis at temperatures of 700–900°C yields spherical molybdenum disulfide microparticles with average diameters in the range 0.6–1 µm and “onion” structure.