Development of the modern vacuum coating technologies

V. P. Frantskevich; A. V. Epel’fel’d; V. A. Vasin; B. L. Krit; O. V. Somov; V. A. Sorokin

doi:10.3103/S1068375516040116

Development of the modern vacuum coating technologies

作者: Frantskevich V.P.¹, Epel’fel’d A.V.², Vasin V.A.³, Krit B.L.², Somov O.V.⁴, Sorokin V.A.¹
隶属关系:
1. AO Kartukov Mechanical-Engineering Design Bureau Iskra
2. Moscow Aviation Institute (National Research University)
3. OAO Polygon MT
4. Perm National Research Polytechnic University
期: 卷 52, 编号 4 (2016)
页面: 392-397
栏目: Article
URL: https://journals.rcsi.science/1068-3755/article/view/229824
DOI: https://doi.org/10.3103/S1068375516040116
ID: 229824

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详细

Modern physical vapor deposition and chemical vapor deposition technologies intended for the protection of surfaces of products, in particular, the pyrolytic deposition of chromium carbide coatings using organometallic compounds as precursors, are discussed.