Electrical Discharge Micromachining in Strong Electric Fields Using Voltage Nanopulses and Streamer Formation of Breakdown Paths

Abstract

This work examines electrical discharge micromachining in the electric breakdown of dielectric liquids. The formation of a breakdown channel using nano- and microsecond pulses is considered. Variants of incomplete and short-time breakdown of the gap are given. Thermal simulations of electrode heating to the melting and evaporation temperatures of the electrode materials are carried out.