Investigation of RF Originated ‘Cold’ Plasma Parameters in Capacitive Coupled Reactor
- Autores: Sargsyan S.T.1
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Afiliações:
- Institute of Radiophysics and Electronics
- Edição: Volume 54, Nº 1 (2019)
- Páginas: 105-109
- Seção: Article
- URL: https://journals.rcsi.science/1068-3372/article/view/228826
- DOI: https://doi.org/10.3103/S1068337219010134
- ID: 228826
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Resumo
We describe a capacitive coupled plasma reactor, where the inert gas molecules are ionized by the radio frequency radiation. The control and measurement system of electrical and optical parameters of the plasma are considered. A qualitative assessment is given of the energy distribution of charge carriers.
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Sobre autores
S. Sargsyan
Institute of Radiophysics and Electronics
Autor responsável pela correspondência
Email: ssargsyan24@gmail.com
Armênia, Ashtarak
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