Отправить статью по E-mail Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate
- Авторы: Lunin L.S.1,2, Devitskii O.V.1,3, Sysoev I.A.3, Pashchenko A.S.1,2, Kas’yanov I.V.3, Nikulin D.A.3, Irkha V.A.1
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Учреждения:
- Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences
- Platov South Russian State Polytechnic University
- North Caucasus Federal University
- Выпуск: Том 45, № 12 (2019)
- Страницы: 1237-1240
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208511
- DOI: https://doi.org/10.1134/S106378501912023X
- ID: 208511
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Аннотация
Thin aluminum nitride (AlN) films on sapphire (Al2O3) substrates were grown by means of ion-beam deposition (IBD) and studied by methods of scanning electron microscopy, Raman scattering, and optical transmission spectroscopy. Results revealed the influence of IBD process parameters (gas mixture composition, ion beam energy, and substrate temperature) on the morphology, structure, and optical properties of obtained thin AlN films on sapphire.
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L. Lunin
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; Platov South Russian State Polytechnic University
Автор, ответственный за переписку.
Email: lunin_ls@mail.ru
Россия, Rostov-on-Don, 344006; Novocherkassk, Rostov oblast, 346428
O. Devitskii
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; North Caucasus Federal University
Email: lunin_ls@mail.ru
Россия, Rostov-on-Don, 344006; Stavropol, 355009
I. Sysoev
North Caucasus Federal University
Email: lunin_ls@mail.ru
Россия, Stavropol, 355009
A. Pashchenko
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; Platov South Russian State Polytechnic University
Email: lunin_ls@mail.ru
Россия, Rostov-on-Don, 344006; Novocherkassk, Rostov oblast, 346428
I. Kas’yanov
North Caucasus Federal University
Email: lunin_ls@mail.ru
Россия, Stavropol, 355009
D. Nikulin
North Caucasus Federal University
Email: lunin_ls@mail.ru
Россия, Stavropol, 355009
V. Irkha
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences
Email: lunin_ls@mail.ru
Россия, Rostov-on-Don, 344006
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