Отправить статью по E-mail An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)
- Авторы: Rudyi A.S.1,2, Vasil’ev S.V.1,2, Lebedev M.E.2, Metlitskaya A.V.1,2, Mironenko A.A.2, Naumov V.V.2, Novozhilova A.V.1,2, Fedorov I.S.2, Churilov A.B.1,2
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Учреждения:
- Demidov Yaroslavl State University
- Institute of Physics and Technology (Yaroslavl Branch)
- Выпуск: Том 43, № 6 (2017)
- Страницы: 503-506
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/204839
- DOI: https://doi.org/10.1134/S106378501706013X
- ID: 204839
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Аннотация
The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.
Об авторах
A. Rudyi
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Автор, ответственный за переписку.
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150000; Yaroslavl, 150007
S. Vasil’ev
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150000; Yaroslavl, 150007
M. Lebedev
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150007
A. Metlitskaya
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150000; Yaroslavl, 150007
A. Mironenko
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150007
V. Naumov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150007
A. Novozhilova
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150000; Yaroslavl, 150007
I. Fedorov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150007
A. Churilov
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl, 150000; Yaroslavl, 150007
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