Electrochemical etching of p–n-GaN/AlGaN photoelectrodes
- Autores: Usikov A.1,2, Helava H.2, Nikiforov A.3, Puzyk M.1,4, Papchenko B.1, Kovaleva Y.1, Makarov Y.2,5
-
Afiliações:
- National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
- Nitride Crystals Inc.
- Boston University, Photonics Center
- Herzen State Pedagogical University of Russia
- Nitride Crystals Group of Companies
- Edição: Volume 42, Nº 5 (2016)
- Páginas: 482-485
- Seção: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/199028
- DOI: https://doi.org/10.1134/S1063785016050151
- ID: 199028
Citar
Resumo
Specific features of etching of GaN/AlGaN p–n structures in a KOH-based electrolyte have been studied. It was found that the corrosion process first passes across p layers through vertical channels associated with threading structural defects. Then, the corrosion process occurs in the lateral direction along n layers of the structure, with local hollows and voids thereby formed. The lateral etching is due to the presence of positive piezoelectric charges at boundaries of n-AlGaN and n-GaN layers and positively charged ionized donors in the space-charge region of the p–n junction.
Sobre autores
A. Usikov
National Research University of Information Technologies, Mechanics, and Optics (ITMO University); Nitride Crystals Inc.
Email: puzyk@mail.ru
Rússia, St. Petersburg, 197101; New York, 11729
H. Helava
Nitride Crystals Inc.
Email: puzyk@mail.ru
Estados Unidos da América, New York, 11729
A. Nikiforov
Boston University, Photonics Center
Email: puzyk@mail.ru
Estados Unidos da América, Boston, MA, 02215
M. Puzyk
National Research University of Information Technologies, Mechanics, and Optics (ITMO University); Herzen State Pedagogical University of Russia
Autor responsável pela correspondência
Email: puzyk@mail.ru
Rússia, St. Petersburg, 197101; St. Petersburg, 191186
B. Papchenko
National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: puzyk@mail.ru
Rússia, St. Petersburg, 197101
Yu. Kovaleva
National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: puzyk@mail.ru
Rússia, St. Petersburg, 197101
Yu. Makarov
Nitride Crystals Inc.; Nitride Crystals Group of Companies
Email: puzyk@mail.ru
Estados Unidos da América, New York, 11729; St. Petersburg, 194156