The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1 –x–yAlxTаyN Coatings Obtained by Reactive Magnetron Sputtering
- Authors: Shugurov A.R.1, Akulinkin A.A.1,2, Kasterov A.M.1, Kalashnikov M.P.1
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Affiliations:
- Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences
- Tomsk Scientific Center, Siberian Branch, Russian Academy of Sciences
- Issue: Vol 45, No 4 (2019)
- Pages: 418-422
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208293
- DOI: https://doi.org/10.1134/S1063785019040291
- ID: 208293
Cite item
Abstract
The evolution of the elemental composition, surface morphology, microstructure, and mechanical properties of Ti1 –x–yAlxTаyN coatings deposited by reactive magnetron sputtering has been studied when the ratio of the partial pressure of nitrogen to the total pressure of reactive gas mixture was increased from 0.1 to 0.5. It is established that most significant changes in the relative content of Ti, Al, and Ta in as-deposited coatings take place when this ratio is varied from 0.1 to 0.3. The observed changes in the elemental composition of Ti1 –x–yAlxTаyN coatings do not influence their phase composition, but lead to changes in the microstructure and mechanical characteristics.
About the authors
A. R. Shugurov
Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences
Author for correspondence.
Email: shugurov@ispms.tsc.ru
Russian Federation, Tomsk, 634055
A. A. Akulinkin
Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences; Tomsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Email: shugurov@ispms.tsc.ru
Russian Federation, Tomsk, 634055; Tomsk, 634055
A. M. Kasterov
Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences
Email: shugurov@ispms.tsc.ru
Russian Federation, Tomsk, 634055
M. P. Kalashnikov
Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences
Email: shugurov@ispms.tsc.ru
Russian Federation, Tomsk, 634055