Electrochemical etching of p–n-GaN/AlGaN photoelectrodes
- Authors: Usikov A.S.1,2, Helava H.2, Nikiforov A.3, Puzyk M.V.1,4, Papchenko B.P.1, Kovaleva Y.V.1, Makarov Y.N.2,5
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Affiliations:
- National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
- Nitride Crystals Inc.
- Boston University, Photonics Center
- Herzen State Pedagogical University of Russia
- Nitride Crystals Group of Companies
- Issue: Vol 42, No 5 (2016)
- Pages: 482-485
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/199028
- DOI: https://doi.org/10.1134/S1063785016050151
- ID: 199028
Cite item
Abstract
Specific features of etching of GaN/AlGaN p–n structures in a KOH-based electrolyte have been studied. It was found that the corrosion process first passes across p layers through vertical channels associated with threading structural defects. Then, the corrosion process occurs in the lateral direction along n layers of the structure, with local hollows and voids thereby formed. The lateral etching is due to the presence of positive piezoelectric charges at boundaries of n-AlGaN and n-GaN layers and positively charged ionized donors in the space-charge region of the p–n junction.
About the authors
A. S. Usikov
National Research University of Information Technologies, Mechanics, and Optics (ITMO University); Nitride Crystals Inc.
Email: puzyk@mail.ru
Russian Federation, St. Petersburg, 197101; New York, 11729
H. Helava
Nitride Crystals Inc.
Email: puzyk@mail.ru
United States, New York, 11729
A. Nikiforov
Boston University, Photonics Center
Email: puzyk@mail.ru
United States, Boston, MA, 02215
M. V. Puzyk
National Research University of Information Technologies, Mechanics, and Optics (ITMO University); Herzen State Pedagogical University of Russia
Author for correspondence.
Email: puzyk@mail.ru
Russian Federation, St. Petersburg, 197101; St. Petersburg, 191186
B. P. Papchenko
National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: puzyk@mail.ru
Russian Federation, St. Petersburg, 197101
Yu. V. Kovaleva
National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: puzyk@mail.ru
Russian Federation, St. Petersburg, 197101
Yu. N. Makarov
Nitride Crystals Inc.; Nitride Crystals Group of Companies
Email: puzyk@mail.ru
United States, New York, 11729; St. Petersburg, 194156