Email this article Experimental Observation of the Confinement of Atomic Collision Cascades during Ion Sputtering of Porous Silicon
- Authors: Ieshkin A.E.1, Tolstoguzov A.B.2,3,4, Svyakhovskiy S.E.1, Drozdov M.N.5, Pelenovich V.O.4
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Affiliations:
- Moscow State University
- Ryazan State Radioengineering University
- Centre for Physics and Technological Research, Physics Department, Faculty of Science and Technology, Universidade Nova de Lisboa
- Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Issue: Vol 45, No 1 (2019)
- Pages: 37-40
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208187
- DOI: https://doi.org/10.1134/S1063785019010267
- ID: 208187
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Abstract
Results of investigation of the mass spectra of secondary ions sputtered from bulk (continuous) and porous silicon targets with various characteristic core particle dimensions are presented. It has been established that the sputtering of nanostructured Si samples leads to a significant increase in the relative yield of massive cluster ions. This effect is especially pronounced when the characteristic nanoparticle size approaches the range of bombarding ions in the Si target. The obtained results are explained taking into account the confinement of atomic collision cascades.
About the authors
A. E. Ieshkin
Moscow State University
Author for correspondence.
Email: ieshkin@physics.msu.ru
Russian Federation, Moscow, 119991
A. B. Tolstoguzov
Ryazan State Radioengineering University; Centre for Physics and Technological Research, Physics Department, Faculty of Science and Technology,Universidade Nova de Lisboa; Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education
and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University
Email: ieshkin@physics.msu.ru
Russian Federation, Ryazan, 390005; Caparica; Wuhan
S. E. Svyakhovskiy
Moscow State University
Email: ieshkin@physics.msu.ru
Russian Federation, Moscow, 119991
M. N. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: ieshkin@physics.msu.ru
Russian Federation, Afonino, Nizhny Novgorod oblast, 603087
V. O. Pelenovich
Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Educationand Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University
Email: ieshkin@physics.msu.ru
China, Wuhan
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