Formation of Porous Germanium Layers by Silver-Ion Implantation
- Authors: Stepanov A.L.1,2, Vorob’ev V.V.2, Nuzhdin V.I.1, Valeev V.F.1, Osin Y.N.2
-
Affiliations:
- Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center
- Interdisciplinary Center for Analytical Microscopy
- Issue: Vol 44, No 4 (2018)
- Pages: 354-357
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207615
- DOI: https://doi.org/10.1134/S1063785018040260
- ID: 207615
Cite item
Abstract
We propose a method for the formation of porous germanium (P-Ge) layers containing silver nanoparticles by means of high-dose implantation of low-energy Ag+ ions into single-crystalline germanium (c-Ge). This is demonstrated by implantation of 30-keV Ag+ ions into a polished c-Ge plate to a dose of 1.5 × 1017 ion/cm2 at an ion beam-current density of 5 μA/cm2. Examination by high-resolution scanning electron microscopy (SEM), atomic-force microscopy (AFM), X-ray diffraction (XRD), energy-dispersive X-ray (EDX) microanalysis, and reflection high-energy electron diffraction (RHEED) showed that the implantation of silver ions into c-Ge surface led to the formation of a P-Ge layer with spongy structure comprising a network of interwoven nanofibers with an average diameter of ∼10–20 nm Ag nanoparticles on the ends of fibers. It is also established that the formation of pores during Ag+ ion implantation is accompanied by effective sputtering of the Ge surface.
About the authors
A. L. Stepanov
Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center; Interdisciplinary Center for Analytical Microscopy
Author for correspondence.
Email: aanstep@gmail.com
Russian Federation, Kazan, Tatarstan, 420029; Kazan, Tatarstan, 420008
V. V. Vorob’ev
Interdisciplinary Center for Analytical Microscopy
Email: aanstep@gmail.com
Russian Federation, Kazan, Tatarstan, 420008
V. I. Nuzhdin
Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center
Email: aanstep@gmail.com
Russian Federation, Kazan, Tatarstan, 420029
V. F. Valeev
Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center
Email: aanstep@gmail.com
Russian Federation, Kazan, Tatarstan, 420029
Yu. N. Osin
Interdisciplinary Center for Analytical Microscopy
Email: aanstep@gmail.com
Russian Federation, Kazan, Tatarstan, 420008