A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam
- Authors: Drozdov M.N.1, Drozdov Y.N.1, Novikov A.V.1,2, Yunin P.A.1,2, Yurasov D.V.1
-
Affiliations:
- Institute for Physics of Microstructures
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 44, No 4 (2018)
- Pages: 320-323
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207579
- DOI: https://doi.org/10.1134/S1063785018040181
- ID: 207579
Cite item
Abstract
New data concerning the influence of a probing beam of bismuth ions on the depth resolution in elemental depth profiling by secondary ion mass spectrometry (SIMS) have been obtained on a TOF.SIMS-5 system using the principle of two separate ion beams. It is established that the existing criterion of nondestructive character of the probing beam, on which this principle is based, is insufficient. Additional processes must be taken into account so as to formulate a more adequate criterion. A regime of depth profiling is proposed that allows the depth resolution to be improved at low energies of sputtering ions.
About the authors
M. N. Drozdov
Institute for Physics of Microstructures
Author for correspondence.
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
Yu. N. Drozdov
Institute for Physics of Microstructures
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
A. V. Novikov
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
P. A. Yunin
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
D. V. Yurasov
Institute for Physics of Microstructures
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950