Electron beam focusing features in a plasma electron source under forevacuum pressures

A. A. Zenin; I. Yu. Bakeev; Yu. A. Burachevskii; A. S. Klimov; E. M. Oks

doi:10.1134/S1063785016070142

Electron beam focusing features in a plasma electron source under forevacuum pressures

Authors: Zenin A.A.¹, Bakeev I.Y.¹, Burachevskii Y.A.¹, Klimov A.S.¹, Oks E.M.¹
Affiliations:
1. Tomsk State University of Control Systems and Radioelectronics
Issue: Vol 42, No 7 (2016)
Pages: 712-714
Section: Article
URL: https://journals.rcsi.science/1063-7850/article/view/199999
DOI: https://doi.org/10.1134/S1063785016070142
ID: 199999

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Abstract

Features of focusing electron beams generated by a forevacuum plasma source under pressures of 10–30 Pa are investigated and the principle possibility of obtaining submillimeter beams is demonstrated. A beam power density of 10⁵ W/cm² is reached at an electron beam diameter of 0.6 mm. The obtained beam parameters offer opportunities for precision electron beam processing of dielectric materials, including hightemperature alumina ceramics.