A magnetosensitive thin-film silicon Hall-type field-effect transistor with operating temperature range expanded up to 350°C
- Authors: Leonov A.V.1, Malykh A.A.1, Mordkovich V.N.1, Pavlyuk M.I.2
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Affiliations:
- Institute of Problems of Microelectronics Technology and High Purity Materials
- Milandr Design and Production Corporation
- Issue: Vol 42, No 1 (2016)
- Pages: 71-74
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/196833
- DOI: https://doi.org/10.1134/S1063785016010272
- ID: 196833
Cite item
Abstract
We describe a magnetosensitive device consisting of a combination of a thin-film Si transistor with built-in conducting channel (fabricated by the silicon-on-insulator technology) and a Hall-type sensor (HS). The transistor has a double-gate field control system of the metal–insulator–semiconductor–insulator–metal type and operates in the regime of carrier accumulation in the channel at partial depletion of adjacent regions of the Si film. It is established that the device can operate at temperatures up to about 350°C, which is 160–180°C higher than the maximum operating temperature of HSs based on bulk Si crystals and comparable with HSs based on wide-bandgap semiconductors.
About the authors
A. V. Leonov
Institute of Problems of Microelectronics Technology and High Purity Materials
Email: malykhanton21@gmail.com
Russian Federation, Chernogolovka, Moscow oblast, 142432
A. A. Malykh
Institute of Problems of Microelectronics Technology and High Purity Materials
Author for correspondence.
Email: malykhanton21@gmail.com
Russian Federation, Chernogolovka, Moscow oblast, 142432
V. N. Mordkovich
Institute of Problems of Microelectronics Technology and High Purity Materials
Email: malykhanton21@gmail.com
Russian Federation, Chernogolovka, Moscow oblast, 142432
M. I. Pavlyuk
Milandr Design and Production Corporation
Email: malykhanton21@gmail.com
Russian Federation, Moscow, 123182