Absolutely Calibrated Spectrally Resolved Measurements of Xe Laser Plasma Radiation Intensity in the EUV Range

P. S. Butorin; Yu. M. Zadiranov; S. Yu. Zuev; S. G. Kalmykov; V. N. Polkovnikov; M. E. Sasin; N. I. Chkhalo

doi:10.1134/S1063784218100080

Absolutely Calibrated Spectrally Resolved Measurements of Xe Laser Plasma Radiation Intensity in the EUV Range

Авторы: Butorin P.¹, Zadiranov Y.², Zuev S.³, Kalmykov S.², Polkovnikov V.³, Sasin M.², Chkhalo N.³
Учреждения:
1. Peter the Great St. Petersburg Polytechnic University
2. Ioffe Institute
3. Institute for Physics of Microstructures, Russian Academy of Sciences
Выпуск: Том 63, № 10 (2018)
Страницы: 1507-1510
Раздел: Optics
URL: https://journals.rcsi.science/1063-7842/article/view/202175
DOI: https://doi.org/10.1134/S1063784218100080
ID: 202175

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Аннотация

With the aid of Mo/Be and Si/Mo interference mirrors, measurements of radiation intensity from laser plasma with Xe gas-jet target have been realized within a wavelength interval of 11–14 nm with a spectral resolution of 3–6 Å. The results are compared with the spectrum formerly measured with the aid of a spectrograph. The ratio of intensities at wavelengths of 11.2 and 13.5 nm has been found to be about 10 under experimental conditions studied.