Modified relations for calculating the dielectric constant of barium–strontium titanate nanofilms

Abstract

The results of measuring the capacitances of planar capacitors are used to calculate the dielectric constants of barium–strontium titanate nanofilms. An expression is derived to calculate an adjustable coefficient to obtain adequate dielectric constants for 20-nm-thick ferroelectric films. The field of applicability of the adjustable coefficient is determined.