Influence of Annealing Temperature on the Microstructure and Morphology of TiN Films Synthesized by Dual Magnetron Sputtering
- Autores: Zaitsev S.1, Vashchilin V.1, Prokhorenkov D.1, Limarenko M.1, Evtushenko E.1
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Afiliações:
- Shukhov State Technological University
- Edição: Volume 63, Nº 8 (2018)
- Páginas: 1189-1193
- Seção: Physics of Nanostructures
- URL: https://journals.rcsi.science/1063-7842/article/view/201846
- DOI: https://doi.org/10.1134/S1063784218080236
- ID: 201846
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Resumo
TiN films synthesized on leucosapphire substrates by dual magnetron sputtering have been annealed in vacuum at 600, 700, 800, and 900°C for 2 min. The microstructure and morphology of the films have been studied by X-ray diffraction and scanning electron microscopy at different temperatures. It has been found that annealing changes the microstructure, texture, grain size, and surface roughness of the TiN films.
Sobre autores
S. Zaitsev
Shukhov State Technological University
Autor responsável pela correspondência
Email: sergey_za@mail.ru
Rússia, Belgorod, 308012
V. Vashchilin
Shukhov State Technological University
Email: sergey_za@mail.ru
Rússia, Belgorod, 308012
D. Prokhorenkov
Shukhov State Technological University
Email: sergey_za@mail.ru
Rússia, Belgorod, 308012
M. Limarenko
Shukhov State Technological University
Email: sergey_za@mail.ru
Rússia, Belgorod, 308012
E. Evtushenko
Shukhov State Technological University
Email: sergey_za@mail.ru
Rússia, Belgorod, 308012