Effect of Material of Metal Sublayer and Deposition Configuration on the Texture Formation in the Piezoactive ZnO Films
- Autores: Veselov A.1, Elmanov V.1, Kiryasova O.1, Nikulin Y.1,2
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Afiliações:
- Kotel’nikov Institute of Radio Engineering and Electronics (Saratov Branch)
- Chernyshevskii State Research University
- Edição: Volume 63, Nº 1 (2018)
- Páginas: 95-103
- Seção: Acoustics, Acoustoelectronics
- URL: https://journals.rcsi.science/1063-7842/article/view/200559
- DOI: https://doi.org/10.1134/S1063784218010279
- ID: 200559
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Resumo
Effect of material of metal sublayer (aluminum, vanadium, chromium, iron, cobalt, nickel, and copper) and deposition configuration on the formation of the oblique and straight texture in the ZnO films is studied. The films that are synthesized in a dc magnetron sputtering system. It is shown that the piezoactive ZnO films with oblique texture that can generate shear waves are formed on the Cr and V metal sublayers in the shifted deposition configuration when the substrate is shifted relative to the magnetron axis toward the region of the target erosion. The piezoactive ZnO films with the straight structure that can generate longitudinal waves are formed on a chemically pure Al sublayer in the symmetric deposition configuration when the substrate is centered with respect to the target. Changes of the sublayer material in both deposition configurations or preliminary oxidation of the sublayer lead to the formation of the piezoactive ZnO films with mixed texture that excite shear and longitudinal waves. Chemical etching is used to show that the ZnO films with the oblique and straight textures exhibit piezoactive properties and can generate hypersound at thicknesses of no less than about 0.3 and about 0.9 μm, respectively.
Sobre autores
A. Veselov
Kotel’nikov Institute of Radio Engineering and Electronics (Saratov Branch)
Autor responsável pela correspondência
Email: labsftwo@mail.ru
Rússia, Saratov, 410019
V. Elmanov
Kotel’nikov Institute of Radio Engineering and Electronics (Saratov Branch)
Email: labsftwo@mail.ru
Rússia, Saratov, 410019
O. Kiryasova
Kotel’nikov Institute of Radio Engineering and Electronics (Saratov Branch)
Email: labsftwo@mail.ru
Rússia, Saratov, 410019
Yu. Nikulin
Kotel’nikov Institute of Radio Engineering and Electronics (Saratov Branch); Chernyshevskii State Research University
Email: labsftwo@mail.ru
Rússia, Saratov, 410019; Saratov, 410012