| Vol 64, No 12 (2019) | 
		23rd INTERNATIONAL SYMPOSIUM “NANOPHYSICS AND NANOELECTRONICS,” Nizhny Novgorod, March 11–14, 2019 | 
		Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes | 
		
					 |