Compact Multichannel Charged-Particle Energy Analyzer Based on a Conical Cut Electrode

Abstract

An electrostatic compact analyzer for obtaining the energy spectrum and for detecting simultaneously charged particles in a wide energy range, which is especially important for fast processes in various materials, has been proposed and designed. The energy analyzer consists of an outer conical electrode with closed end faces, which is cut into parts and fed in accordance with the law of odd numbers, and an grounded inner electrode on the surface of which charged particle beams with a wide energy range are focused. To increase the sharpness of low-energy beam focusing, an auxiliary, very small conical electrode is introduced. In spite of the small energy dispersion factor, the optimal regime of operation of the proposed analyzer with energy resolution not worse than 1% has been found.