Analysis of the Mo/Mo Nanocrystalline Optical Coating Obtained with the Aid of Simultaneous Deposition and Ion Sputtering
- Authors: Rogov A.V.1,2, Martynenko Y.V.1,3, Kapustin Y.V.1,2, Fanchenko S.S.1, Belova N.E.1
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Affiliations:
- National Research Center Kurchatov Institute
- International Fusion Project Coordinating Centre
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Issue: Vol 63, No 5 (2018)
- Pages: 700-710
- Section: Solid State
- URL: https://journals.rcsi.science/1063-7842/article/view/201380
- DOI: https://doi.org/10.1134/S1063784218050195
- ID: 201380
Cite item
Abstract
Structure, optical properties, and resistance to sputtering are studied for a reflecting Mo-coating that is fabricated using magnetron deposition with simultaneous low-energy ion sputtering at the deposition rate that is higher than the etching rate. A Mo-polycrystalline mirror is used as a substrate. It is shown that the coating exhibits textured nanocrystalline structure with a relatively low spread of crystallite sizes and high resistance to sputtering. It is also demonstrated that the spectral reflection coefficient of such a Mo-coating differs from the spectral reflection coefficient of polycrystalline and single-crystalline Mo and the difference results from the effect of the structure of coating on its optical properties. A theoretical model of the coating formation is proposed.
About the authors
A. V. Rogov
National Research Center Kurchatov Institute; International Fusion Project Coordinating Centre
Author for correspondence.
Email: alex-rogov@yandex.ru
Russian Federation, Moscow, 123182; Moscow, 123182
Yu. V. Martynenko
National Research Center Kurchatov Institute; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: alex-rogov@yandex.ru
Russian Federation, Moscow, 123182; Moscow, 115409
Yu. V. Kapustin
National Research Center Kurchatov Institute; International Fusion Project Coordinating Centre
Email: alex-rogov@yandex.ru
Russian Federation, Moscow, 123182; Moscow, 123182
S. S. Fanchenko
National Research Center Kurchatov Institute
Email: alex-rogov@yandex.ru
Russian Federation, Moscow, 123182
N. E. Belova
National Research Center Kurchatov Institute
Email: alex-rogov@yandex.ru
Russian Federation, Moscow, 123182