Dependence of the structure of ion-modified NiTi single crystal layers on the orientation of irradiated surface
- Authors: Poletika T.M.1, Meisner L.L.1,2, Girsova S.L.1, Tverdokhlebova A.V.1, Meisner S.N.1,2
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Affiliations:
- Institute of Strength Physics and Material Sciences, Siberian Branch
- National Research Tomsk State University
- Issue: Vol 62, No 7 (2017)
- Pages: 1034-1042
- Section: Solid State
- URL: https://journals.rcsi.science/1063-7842/article/view/199660
- DOI: https://doi.org/10.1134/S1063784217070180
- ID: 199660
Cite item
Abstract
The composition and structure of Si layers implanted into titanium nickelide single crystals with different orientations relative to the ion beam propagation direction have been studied using Auger electron spectroscopy and transmission electron microscopy. The role of the “soft” [111]B2 and “hard” [001]B2 NiTi orientations in the formation of the structure of ion-modified surface layer, as well as the defect structure of the surface layers of the single crystals, has been revealed. Orientation effects of selective sputtering and channeling of ions, which control the composition and thickness of the oxide and amorphous layers being formed, ion and impurity penetration depth, as well as the concentration profile of the Ni distribution over the surface, have been detected.
About the authors
T. M. Poletika
Institute of Strength Physics and Material Sciences, Siberian Branch
Author for correspondence.
Email: poletm@ispms.tsc.ru
Russian Federation, Tomsk, 634055
L. L. Meisner
Institute of Strength Physics and Material Sciences, Siberian Branch; National Research Tomsk State University
Email: poletm@ispms.tsc.ru
Russian Federation, Tomsk, 634055; Tomsk, 634036
S. L. Girsova
Institute of Strength Physics and Material Sciences, Siberian Branch
Email: poletm@ispms.tsc.ru
Russian Federation, Tomsk, 634055
A. V. Tverdokhlebova
Institute of Strength Physics and Material Sciences, Siberian Branch
Email: poletm@ispms.tsc.ru
Russian Federation, Tomsk, 634055
S. N. Meisner
Institute of Strength Physics and Material Sciences, Siberian Branch; National Research Tomsk State University
Email: poletm@ispms.tsc.ru
Russian Federation, Tomsk, 634055; Tomsk, 634036